Custom solution for the semiconductor industry
Precise handling of silicon rods under challenging conditions
In semiconductor manufacturing, precision, cleanliness and process reliability are decisive factors, especially when handling silicon rods. High temperatures, strong electromagnetic fields and, not least, cleanroom requirements pose major technical challenges. For a customer from the semiconductor industry, we developed an innovative custom solution: a non-magnetic, electropolished handling vehicle that was designed and built specifically for the temperature-resistant, precise and automated removal and transport of silicon rods in sensitive manufacturing processes.
Automated process integration in a high-tech environment
The vehicle is integrated into the production process and communicates directly with the pulling system.
- Exact positioning: The operator controls the vehicle via radio remote control. Laser pointers and floor markings support precise alignment in front of the pulling system.
- Automated communication: Via a Wi-Fi connection, the vehicle exchanges signals with the pulling system for lowering and stopping the receiving plate by means of a rope length encoder.
- Safe load transfer: The silicon rods are picked up and set down on an electrically driven support plate with a foldable fall-prevention device.
- Gentle lowering movements: The pulling system control regulates, on the one hand, the lowering speed and, on the other hand, via a weighing device, the contact weight of the silicon rod in the receiving plate. This protects the sensitive material.
- Separation of the crystal thin neck: After the transfer process is complete, the system separates the thin neck while the handling vehicle holds the weight.
- Flexible downstream processing: Using the radio remote control, the operator swivels the receiving trough into the horizontal position, transports the crystal to the transfer station and returns to the parking position.
Operation & safety
The intuitive radio remote control with ergonomic operating logic enables safe manual control.
- Safety features: Emergency stop, status indicators and multi-stage enable logic increase operational safety.
- Even in the event of faults or system shutdown, the vehicle remains fully controllable.
Cleanroom suitability & cleaning
The vehicle was developed specifically for use under cleanroom conditions in accordance with ISO 14664-1, Class 9. It ensures that silicon rods are picked up and transported cleanly and free of contamination. This makes a decisive contribution to maintaining the highest cleanliness standards in semiconductor manufacturing.
- Smooth, media-resistant surfaces that significantly reduce particle adhesion
- Electropolished stainless-steel components that enable particularly gentle and easy cleaning, thereby minimizing the risk of contamination
Designed for continuous operation
The design is optimized for 3-shift operation with minimal maintenance effort.
- Electric drive: no hydraulics for higher precision and lower wear
- Durable components with high cycle resistance
Customer-specific development for the highest requirements in semiconductor production
This custom solution was created in close cooperation with our customer and was precisely tailored to the extreme conditions in silicon crystal growth and wafer production.
By combining many years of experience in special-purpose machine engineering, in-depth materials expertise and intelligent system integration, we created a non-magnetic handling vehicle that meets the demanding requirements of the semiconductor industry:
It ensures maximum process reliability, protects the cleanliness of sensitive silicon crystals and enables a precise, automated sequence within the sensitive manufacturing chain.
The customer received a tailor-made custom solution that integrates seamlessly into the existing production process and has proven itself under real operating conditions as efficient, robust and reliable.